TiO2 is a semiconductor that possesses superior chemical and physical properties, widely used in various fields. In this research, the synthesis of TiO2 particles was carried out by the sonochemical method. Synthesis begins by mixing the precursor TiOSO4 in H2O with a ratio of the solvent volume (v/v) H2O/TiOSO4 20-80. TiO2 particles through sonochemically reduced for 15-75 minutes. Changes in particle diameter during the synthesis process are calculated by particle size analyzer. The results of the particle size analyzer showed that the increase in the solvent volume ratio causes the average diameter of TiO2 particles to increase with a heterogeneous size distribution. Conversely, the increasing time on sonochemical processing causes a very significant decrease in the average particle diameter. The best parameter in the sonochemical method was the lowest solvent volume ratio, 20, and the sonochemical time process of 75 minutes generated a single anatase phase 338 nm with a spherical shape.