TY - JOUR
T1 - Surface conductivity dependent dynamic behaviour of an ultrafine atmospheric pressure plasma jet for microscale surface processing
AU - Abuzairi, Tomy
AU - Okada, Mitsuru
AU - Bhattacharjee, Sudeep
AU - Nagatsu, Masaaki
N1 - Funding Information:
This work was supported by Grants-in-Aid for Scientific Research on Innovative Areas (No. 21110010 ) and Scientific Research (A) (No. 25246029 ) from the Japan Society for the Promotion of Science . One of the authors (S.B.) gratefully acknowledges support from a research award of Overseas Partners Invitation Program, as part of Asia Bridge Program of Shizuoka University, Japan, during January–March 2015, which helped to carry out this collaborative work.
Publisher Copyright:
© 2016 Elsevier B.V.
PY - 2016/12/30
Y1 - 2016/12/30
N2 - An experimental study on the dynamic behaviour of microcapillary atmospheric pressure plasma jets (APPJs) with 5 μm tip size for surfaces of different conductivity is reported. Electrical and spatio-temporal characteristics of the APPJs are monitored using high voltage probe, current monitor and high speed intensified charge couple device camera. From these experimental results, we presented a simple model to understand the electrical discharge characteristics of the capillary APPJs with double electrodes, and estimated the velocity of the ionization fronts in the jet and the electron density to be 3.5–4.2 km/s and 2–7 × 10 17 m −3 . By analyzing the dynamics of the microcapillary APPJs for different substrate materials, it was found that the surface irradiation area strongly depended on the substrate conductivity and permittivity, especially in the case of polymer-like substrate, surface irradiation area was significantly broadened probably due to the repelling behaviour of the plasma jets from the accumulated electrical charges on the polymer surface. The effect of applying a substrate bias in the range from −900 V to +900 V on the plasma irradiation onto the substrates was also investigated. From the knowledge of the present results, it is helpful for choosing the substrate materials for microscale surface modification.
AB - An experimental study on the dynamic behaviour of microcapillary atmospheric pressure plasma jets (APPJs) with 5 μm tip size for surfaces of different conductivity is reported. Electrical and spatio-temporal characteristics of the APPJs are monitored using high voltage probe, current monitor and high speed intensified charge couple device camera. From these experimental results, we presented a simple model to understand the electrical discharge characteristics of the capillary APPJs with double electrodes, and estimated the velocity of the ionization fronts in the jet and the electron density to be 3.5–4.2 km/s and 2–7 × 10 17 m −3 . By analyzing the dynamics of the microcapillary APPJs for different substrate materials, it was found that the surface irradiation area strongly depended on the substrate conductivity and permittivity, especially in the case of polymer-like substrate, surface irradiation area was significantly broadened probably due to the repelling behaviour of the plasma jets from the accumulated electrical charges on the polymer surface. The effect of applying a substrate bias in the range from −900 V to +900 V on the plasma irradiation onto the substrates was also investigated. From the knowledge of the present results, it is helpful for choosing the substrate materials for microscale surface modification.
KW - Dynamic behaviour
KW - ICCD image
KW - Microcapillary
KW - Substrate materials
KW - Surface modification
KW - Ultrafine atmospheric pressure plasma jet
UR - http://www.scopus.com/inward/record.url?scp=84989919316&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2016.08.047
DO - 10.1016/j.apsusc.2016.08.047
M3 - Article
AN - SCOPUS:84989919316
SN - 0169-4332
VL - 390
SP - 489
EP - 496
JO - Applied Surface Science
JF - Applied Surface Science
ER -