Health Information System (HIS) need to be improved to decrease the difficulties of health information accessibility, such as time response, reliability, relevancy, ease of use, and so on. This paper aims to provide a comprehensive review of HIS development, detailing the findings and factors that can be used to guide future development of HIS in order to obtain the benefit. To conduct a systematic review has been done by using Preferred Reporting Items for Systematic Reviews and Meta-analyses (PRISMA) method based on data sources from ScienceDirect, IEEEXplore, SpringerLink, and Emerald. Through literature reviews, we obtained 20 papers to complete this research from 102 papers. After conducting a systematic literature review, we attempted to propose a success factor model for Health Information System by using one of Structural Equation Modeling (SEM) techniques: Partial Least Square (PLS). As a result, we found System Quality, Service Quality, Trust, Intention to Use, User Satisfaction are the success factor of Health Information System development.