STUDI DISORDER LAPISAN TIPIS AMORF SILIKON KARBON (a-SiC:H) HASIL DEPOSISI METODE DC SPUTTERING

Lusitra Munisa, Rosari Saleh

Research output: Contribution to journalArticle

Original languageEnglish
JournalMAKARA of Science Series
Volume6
Issue number2
DOIs
Publication statusPublished - 2002

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