Structural characterization of a-Si:C:H alloys prepared by dc sputtering

Rosari Saleh, L. Munisa, W. Beyer

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The microstructure of dc sputtered amorphous silicon carbon (a-Si:C:H) films have been studied using infrared absorption, hydrogen effusion as well as secondary ion mass spectroscopy (SIMS) profiling of hydrogen-deuterium (H/D) inter-diffusion measurements. A comparison of the three methods shows the presence of a structural transition at a carbon concentration of about 25 at.% and it is attributed to hydrogen-induced void formation. Effusion measurements of implanted inert gases suggest giving information about sizes of microstructure.

Original languageEnglish
Pages (from-to)891-895
Number of pages5
JournalJournal of Non-Crystalline Solids
Issue numberPART 2
Publication statusPublished - 1 Apr 2002


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