Room-temperature terahertz antenna-coupled microbolometers with titanium thermistor and heater

Norihisa Hiromoto, Amit Banerjee, Durgadevi Elamaran, Makoto Aoki, Catur Apriono, Hiroaki Satoh, Erik Bruendermann, Eko Tjipto Rahardjo, Hiroshi Inokawa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as inspection for safety, nondestructive sensing in industry and construction, noninvasive examination for medicine and pharmacy. We have studied THz antenna-coupled bolometers with titanium (Ti) thermistor and heater fabricated on a high-resistivity silicon (Si) substrate with MEMS structures in order to develop uncooled high-performance sensors. In this paper, we report the study on design, electromagnetic (EM) and thermal simulation, fabrication, experiment of THz-wave measurement, and evaluation of performance for single-detector devices, by which large THz array detectors are easily developed. We have achieved good performance as low noise-equivalent power (NEP) of the orders of 10-11 W/Hz1/2 and response frequency of 5.5 kHz by studying a Ti thermistor with thin meander line for the THz antenna-coupled bolometer.

Original languageEnglish
Title of host publication2019 16th International Conference on Quality in Research, QIR 2019 - International Symposium on Electrical and Computer Engineering
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728118987
DOIs
Publication statusPublished - Jul 2019
Event16th International Conference on Quality in Research, QIR 2019 - Padang, Indonesia
Duration: 22 Jul 201924 Jul 2019

Publication series

Name2019 16th International Conference on Quality in Research, QIR 2019 - International Symposium on Electrical and Computer Engineering

Conference

Conference16th International Conference on Quality in Research, QIR 2019
CountryIndonesia
CityPadang
Period22/07/1924/07/19

Keywords

  • Array
  • Bolometer
  • Detector
  • Meander line
  • Noise equivalent power (NEP)
  • Nondestructive
  • responsivity
  • Room temperature
  • Sensing
  • Temperature coefficient of resistance (TCR)
  • Terahertz (THz)
  • Thermistor
  • Uncooled

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