@inproceedings{853db5132da1485a883ddef8cf407579,
title = "Room-temperature terahertz antenna-coupled microbolometers with titanium thermistor and heater",
abstract = "High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as inspection for safety, nondestructive sensing in industry and construction, noninvasive examination for medicine and pharmacy. We have studied THz antenna-coupled bolometers with titanium (Ti) thermistor and heater fabricated on a high-resistivity silicon (Si) substrate with MEMS structures in order to develop uncooled high-performance sensors. In this paper, we report the study on design, electromagnetic (EM) and thermal simulation, fabrication, experiment of THz-wave measurement, and evaluation of performance for single-detector devices, by which large THz array detectors are easily developed. We have achieved good performance as low noise-equivalent power (NEP) of the orders of 10-11 W/Hz1/2 and response frequency of 5.5 kHz by studying a Ti thermistor with thin meander line for the THz antenna-coupled bolometer.",
keywords = "Array, Bolometer, Detector, Meander line, Noise equivalent power (NEP), Nondestructive, responsivity, Room temperature, Sensing, Temperature coefficient of resistance (TCR), Terahertz (THz), Thermistor, Uncooled",
author = "Norihisa Hiromoto and Amit Banerjee and Durgadevi Elamaran and Makoto Aoki and Catur Apriono and Hiroaki Satoh and Erik Bruendermann and Rahardjo, {Eko Tjipto} and Hiroshi Inokawa",
year = "2019",
month = jul,
doi = "10.1109/QIR.2019.8898200",
language = "English",
series = "2019 16th International Conference on Quality in Research, QIR 2019 - International Symposium on Electrical and Computer Engineering",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 16th International Conference on Quality in Research, QIR 2019 - International Symposium on Electrical and Computer Engineering",
address = "United States",
note = "16th International Conference on Quality in Research, QIR 2019 ; Conference date: 22-07-2019 Through 24-07-2019",
}