TY - GEN
T1 - Modification of surface roughness for a narrow path microfluidic application
AU - Istiyanto, Jos
AU - Muhadiyantoro, Dwi
AU - Whulanza, Yudan
N1 - Publisher Copyright:
© 2018 Author(s).
PY - 2018/7/13
Y1 - 2018/7/13
N2 - Micro-fabrication is a technology that uses several methods in its application. There are 3 methods in micro-fabrication: physical process, chemical process, and biological process. The main methods used in material feeding are milling, chemical etching, and bio-machining. Each method will results surface roughness value. This research analyzes the surface roughness value by comparing each other to see the best surface roughness value in mold microfluidic application on copper. There are 2 methods to be compared, those are bio-machining and etching. Those methods are natural and random because the roughness produced doesn't have clear pattern. Research in etching method is done by variating time between 6, 8, 10 and 12 minutes. However, in bio-machining the time variations are 12 and 24 hours based on the previous research. Based on the research done, the optimum result for each method is obtained. For etching method, the best result obtained at 8 minutes with 2.03 μm surface roughness value & 31.89 μm depth. The best result for bio-machining obtained at 24 hours with 2.02 μm surface roughness value & 43.1 μm depth. Based on those values, it can be concluded that optimum value for etching has smaller depth compared to biomachining.
AB - Micro-fabrication is a technology that uses several methods in its application. There are 3 methods in micro-fabrication: physical process, chemical process, and biological process. The main methods used in material feeding are milling, chemical etching, and bio-machining. Each method will results surface roughness value. This research analyzes the surface roughness value by comparing each other to see the best surface roughness value in mold microfluidic application on copper. There are 2 methods to be compared, those are bio-machining and etching. Those methods are natural and random because the roughness produced doesn't have clear pattern. Research in etching method is done by variating time between 6, 8, 10 and 12 minutes. However, in bio-machining the time variations are 12 and 24 hours based on the previous research. Based on the research done, the optimum result for each method is obtained. For etching method, the best result obtained at 8 minutes with 2.03 μm surface roughness value & 31.89 μm depth. The best result for bio-machining obtained at 24 hours with 2.02 μm surface roughness value & 43.1 μm depth. Based on those values, it can be concluded that optimum value for etching has smaller depth compared to biomachining.
UR - http://www.scopus.com/inward/record.url?scp=85050487713&partnerID=8YFLogxK
U2 - 10.1063/1.5046269
DO - 10.1063/1.5046269
M3 - Conference contribution
AN - SCOPUS:85050487713
T3 - AIP Conference Proceedings
BT - Disruptive Innovation in Mechanical Engineering for Industry Competitiveness
A2 - Djanali, Vivien S.
A2 - Suwarno, null
A2 - Pramujati, Bambang
A2 - Yartys, Volodymyr A.
PB - American Institute of Physics Inc.
T2 - 3rd International Conference on Mechanical Engineering, ICOME 2017
Y2 - 5 October 2017 through 6 October 2017
ER -