Metal based micro-feature fabrication using biomachining process

Jos Istiyanto; Agung Shamsuddin Saragih; Tae Jo Ko

doi:10.1016/j.mee.2012.07.002

Metal based micro-feature fabrication using biomachining process

Jos Istiyanto, Agung Shamsuddin Saragih, Tae Jo Ko

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features.

Original language	English
Pages (from-to)	561-565
Number of pages	5
Journal	Microelectronic Engineering
Volume	98
DOIs	https://doi.org/10.1016/j.mee.2012.07.002
Publication status	Published - Oct 2012

Keywords

Acidithiobacillus ferrooxidans
Biomachining
Micro-feature
Pure copper

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10.1016/j.mee.2012.07.002

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title = "Metal based micro-feature fabrication using biomachining process",

abstract = "Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features.",

keywords = "Acidithiobacillus ferrooxidans, Biomachining, Micro-feature, Pure copper",

author = "Jos Istiyanto and Saragih, {Agung Shamsuddin} and Ko, {Tae Jo}",

note = "Funding Information: This work was supported by a Grant from the National Research Foundation of Korea funded by the Korean Government (KRF-2008-313-D00055).",

year = "2012",

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AU - Istiyanto, Jos

AU - Saragih, Agung Shamsuddin

AU - Ko, Tae Jo

N1 - Funding Information: This work was supported by a Grant from the National Research Foundation of Korea funded by the Korean Government (KRF-2008-313-D00055).

PY - 2012/10

Y1 - 2012/10

N2 - Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features.

AB - Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features.

KW - Acidithiobacillus ferrooxidans

KW - Biomachining

KW - Micro-feature

KW - Pure copper

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VL - 98

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EP - 565

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Metal based micro-feature fabrication using biomachining process

Abstract

Keywords

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