Metal based micro-feature fabrication using biomachining process

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

Biomachining processes that use microorganisms as the tool to remove metal from a workpiece may have environmental advantages. These processes, used innovatively, will be an alternative technology for micro machining. The objective of this study is to investigate the feasibility of biomachining processes in fabricating micro-size features on pure copper. This paper presents Acidithiobacillus ferrooxidans-based biomachining processes of pure copper and their performance in producing several complex features.

Original languageEnglish
Pages (from-to)561-565
Number of pages5
JournalMicroelectronic Engineering
Volume98
DOIs
Publication statusPublished - 1 Oct 2012

Keywords

  • Acidithiobacillus ferrooxidans
  • Biomachining
  • Micro-feature
  • Pure copper

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