@inproceedings{a1e9594da68c4aa2bea8c43028498295,
title = "Maskless visible-light photolithography of copper microheater for dynamic microbioreactor",
abstract = "Advances in microfabrication have led to the development of microbioreactor including microheater as one of important components for microbioreactor. Microheater should be fabricated based on specific requirement of microbioreactor including shape, size, target working temperature, and heating rate profile, where they would determine the heat distribution to the microbioreactor. Here, we propose serpentine-shaped and spiral-shaped microheaters for a dynamic-flow microbioreactor. Computer models were generated and characterized by finite element analysis (FEA) to simulate the heating performance. Microheaters were then fabricated by maskless photolithography using visible light generated by a commercial digital light projector (DLP) followed by wet etching. Geometrical features of fabricated microheaters were then measured to characterize the design transfer. FEA result shows that given same amount of input electrical power and observation time; both microheaters have different heat distribution profiles which could affect the heating control scheme. Geometrical measurement on certain segments shows that the current fabrication technique can transfer the design with dimensional error percentage of 0.5 to 39 % without significant change in the geometrical shape.",
keywords = "Bioreactor, icrofabrication, microheater, photolithography",
author = "Utomo, {Muhammad Satrio} and Yudan Whulanza and Gandjar Kiswanto",
note = "Publisher Copyright: {\textcopyright} 2019 Author(s).; 4th International Symposium of Biomedical Engineering�s Recent Progress in Biomaterials, Drugs Development, Health, and Medical Devices, ISBE 2019 ; Conference date: 22-07-2019 Through 24-07-2019",
year = "2019",
month = dec,
day = "10",
doi = "10.1063/1.5139386",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Kenny Lischer and Tomy Abuzairi and Rahman, {Siti Fauziyah} and Misri Gozan",
booktitle = "4th Biomedical Engineering''s Recent Progress in Biomaterials, Drugs Development, Health, and Medical Devices",
address = "United States",
}