Maskless visible-light photolithography of copper microheater for dynamic microbioreactor

Muhammad Satrio Utomo, Yudan Whulanza, Gandjar Kiswanto

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Advances in microfabrication have led to the development of microbioreactor including microheater as one of important components for microbioreactor. Microheater should be fabricated based on specific requirement of microbioreactor including shape, size, target working temperature, and heating rate profile, where they would determine the heat distribution to the microbioreactor. Here, we propose serpentine-shaped and spiral-shaped microheaters for a dynamic-flow microbioreactor. Computer models were generated and characterized by finite element analysis (FEA) to simulate the heating performance. Microheaters were then fabricated by maskless photolithography using visible light generated by a commercial digital light projector (DLP) followed by wet etching. Geometrical features of fabricated microheaters were then measured to characterize the design transfer. FEA result shows that given same amount of input electrical power and observation time; both microheaters have different heat distribution profiles which could affect the heating control scheme. Geometrical measurement on certain segments shows that the current fabrication technique can transfer the design with dimensional error percentage of 0.5 to 39 % without significant change in the geometrical shape.

Original languageEnglish
Title of host publication4th Biomedical Engineering''s Recent Progress in Biomaterials, Drugs Development, Health, and Medical Devices
Subtitle of host publicationProceedings of the International Symposium of Biomedical Engineering, ISBE 2019
EditorsKenny Lischer, Tomy Abuzairi, Siti Fauziyah Rahman, Misri Gozan
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735419445
DOIs
Publication statusPublished - 10 Dec 2019
Event4th International Symposium of Biomedical Engineering�s Recent Progress in Biomaterials, Drugs Development, Health, and Medical Devices, ISBE 2019 - Padang, West Sumatera, Indonesia
Duration: 22 Jul 201924 Jul 2019

Publication series

NameAIP Conference Proceedings
Volume2193
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference4th International Symposium of Biomedical Engineering�s Recent Progress in Biomaterials, Drugs Development, Health, and Medical Devices, ISBE 2019
Country/TerritoryIndonesia
CityPadang, West Sumatera
Period22/07/1924/07/19

Keywords

  • Bioreactor
  • icrofabrication
  • microheater
  • photolithography

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