Infrared and effusion of hydrogen, as well as of the inert gases, were studied for dc magnetron sputtered a-Si:C:H films. A structural transition from compact to void-rich material is observed and attributed to hydrogen-induced void formation. Inert gas atoms were incorporated into the material by ion implantation. It is shown that the inert gas effusion spectra give the information about sizes of microstructure.
|Number of pages||5|
|Journal||International Journal of Modern Physics B|
|Publication status||Published - 20 Mar 2002|