Infrared and hydrogen effusion studies of amorphous silicon carbon (a-Si:C:H) films prepared by DC magnetron sputtering (DCMS)

Rosari Saleh; Lusitra Munisa; Wolfhard Beyer

doi:10.1142/s0217979202010956

Infrared and hydrogen effusion studies of amorphous silicon carbon (a-Si:C:H) films prepared by DC magnetron sputtering (DCMS)

Rosari Saleh, Lusitra Munisa, Wolfhard Beyer

Department of Physics

Research output: Contribution to journal › Article › peer-review

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Abstract

Infrared and effusion of hydrogen, as well as of the inert gases, were studied for dc magnetron sputtered a-Si:C:H films. A structural transition from compact to void-rich material is observed and attributed to hydrogen-induced void formation. Inert gas atoms were incorporated into the material by ion implantation. It is shown that the inert gas effusion spectra give the information about sizes of microstructure.

Original language	English
Pages (from-to)	1110-1114
Number of pages	5
Journal	International Journal of Modern Physics B
Volume	16
Issue number	6-7
DOIs	https://doi.org/10.1142/s0217979202010956
Publication status	Published - 20 Mar 2002

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AU - Beyer, Wolfhard

PY - 2002/3/20

Y1 - 2002/3/20

N2 - Infrared and effusion of hydrogen, as well as of the inert gases, were studied for dc magnetron sputtered a-Si:C:H films. A structural transition from compact to void-rich material is observed and attributed to hydrogen-induced void formation. Inert gas atoms were incorporated into the material by ion implantation. It is shown that the inert gas effusion spectra give the information about sizes of microstructure.

AB - Infrared and effusion of hydrogen, as well as of the inert gases, were studied for dc magnetron sputtered a-Si:C:H films. A structural transition from compact to void-rich material is observed and attributed to hydrogen-induced void formation. Inert gas atoms were incorporated into the material by ion implantation. It is shown that the inert gas effusion spectra give the information about sizes of microstructure.

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Infrared and hydrogen effusion studies of amorphous silicon carbon (a-Si:C:H) films prepared by DC magnetron sputtering (DCMS)

Abstract

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