High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

Norihisa Hiromoto, Amit Banerjee, Durgadevi Elamaran, Makoto Aoki, Catur Apriono, Hiroaki Satoh, Erik Bruendermann, Eko Tjipto Rahardjo, Hiroshi Inokawa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In order to make room-temperature terahertz (THz) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10-11 W/Hz1/2 and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1~ mu text{m}-wide and 90 mu text{m}-long.

Original languageEnglish
Title of host publicationIRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves
PublisherIEEE Computer Society
ISBN (Electronic)9781538682852
DOIs
Publication statusPublished - Sep 2019
Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
Duration: 1 Sep 20196 Sep 2019

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume2019-September
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Conference

Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
CountryFrance
CityParis
Period1/09/196/09/19

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