High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

Norihisa Hiromoto; Amit Banerjee; Durgadevi Elamaran; Makoto Aoki; Catur Apriono; Hiroaki Satoh; Erik Bruendermann; Eko Tjipto Rahardjo; Hiroshi Inokawa

doi:10.1109/IRMMW-THz.2019.8874346

High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

Norihisa Hiromoto, Amit Banerjee, Durgadevi Elamaran, Makoto Aoki, Catur Apriono, Hiroaki Satoh, Erik Bruendermann, Eko Tjipto Rahardjo, Hiroshi Inokawa

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

In order to make room-temperature terahertz (THz) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10-11 W/Hz^1/2 and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1~ mu text{m}-wide and 90 mu text{m}-long.

Original language	English
Title of host publication	IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538682852
DOIs	https://doi.org/10.1109/IRMMW-THz.2019.8874346
Publication status	Published - Sept 2019
Event	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France Duration: 1 Sept 2019 → 6 Sept 2019

Publication series

Name	International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume	2019-September
ISSN (Print)	2162-2027
ISSN (Electronic)	2162-2035

Conference

Conference	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Country/Territory	France
City	Paris
Period	1/09/19 → 6/09/19

Access to Document

10.1109/IRMMW-THz.2019.8874346

Cite this

Hiromoto, N., Banerjee, A., Elamaran, D., Aoki, M., Apriono, C., Satoh, H., Bruendermann, E., Rahardjo, E. T., & Inokawa, H. (2019). High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor. In IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves Article 8874346 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2019-September). IEEE Computer Society. https://doi.org/10.1109/IRMMW-THz.2019.8874346

Hiromoto, Norihisa ; Banerjee, Amit ; Elamaran, Durgadevi et al. / High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor. IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Computer Society, 2019. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz).

@inproceedings{5e520dec18894ee299a694acb2440688,

title = "High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor",

abstract = "In order to make room-temperature terahertz (THz) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10-11 W/Hz1/2 and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1~ mu text{m}-wide and 90 mu text{m}-long.",

author = "Norihisa Hiromoto and Amit Banerjee and Durgadevi Elamaran and Makoto Aoki and Catur Apriono and Hiroaki Satoh and Erik Bruendermann and Rahardjo, {Eko Tjipto} and Hiroshi Inokawa",

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Hiromoto, N, Banerjee, A, Elamaran, D, Aoki, M, Apriono, C, Satoh, H, Bruendermann, E, Rahardjo, ET & Inokawa, H 2019, High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor. in IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8874346, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2019-September, IEEE Computer Society, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 1/09/19. https://doi.org/10.1109/IRMMW-THz.2019.8874346

High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor. / Hiromoto, Norihisa; Banerjee, Amit; Elamaran, Durgadevi et al.
IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Computer Society, 2019. 8874346 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

AU - Hiromoto, Norihisa

AU - Banerjee, Amit

AU - Elamaran, Durgadevi

AU - Aoki, Makoto

AU - Apriono, Catur

AU - Satoh, Hiroaki

AU - Bruendermann, Erik

AU - Rahardjo, Eko Tjipto

AU - Inokawa, Hiroshi

PY - 2019/9

Y1 - 2019/9

N2 - In order to make room-temperature terahertz (THz) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10-11 W/Hz1/2 and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1~ mu text{m}-wide and 90 mu text{m}-long.

AB - In order to make room-temperature terahertz (THz) detectors with high-detectivity, we have studied room-temperature THz antenna-coupled bolometers with titanium (Ti) meander-line thermistor fabricated on a high-resistivity silicon (Si) substrate by MEMS process. In this paper, we report the spectrum of responsivity which spreads at least in the range of 0.1 THz width around 1 THz. There are high-responsivity bands with the orders of 1000 V/W in the spectrum. Thanks to the meander-line and low noise of metal thermistors, we have achieved good noise-equivalent power (NEP) of the order of 10-11 W/Hz1/2 and response speed of 5 kHz for the room-temperature antenna-coupled bolometers with a Ti thermistor 0.1~ mu text{m}-wide and 90 mu text{m}-long.

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T3 - International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz

BT - IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves

PB - IEEE Computer Society

T2 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019

Y2 - 1 September 2019 through 6 September 2019

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Hiromoto N, Banerjee A, Elamaran D, Aoki M, Apriono C, Satoh H et al. High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor. In IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Computer Society. 2019. 8874346. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). doi: 10.1109/IRMMW-THz.2019.8874346

High Responsivity and Low NEP of Room-Temperature Terahertz Antenna-Coupled Microbolometers with Meander Titanium Thermistor

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