TY - JOUR
T1 - Gas-sensing characteristics of modified-MoO3 thin films using Ti-overlayers for NH3 gas sensors
AU - Imawan, C.
AU - Solzbacher, F.
AU - Steffes, H.
AU - Obermeier, E.
N1 - Funding Information:
The authors wish to thank Dr. P. Fricke at the Institute Fresenius, Dresden for the RD measurements. Financial support through the German Ministry of Education, Research and Technology BMBF is gratefully acknowledged.
PY - 2000/6/10
Y1 - 2000/6/10
N2 - Thin films of modified MoO3 using Ti-overlayers have been deposited by magnetron sputtering. The gas-sensing characteristics of the sensor element, the influence of the Ti-overlayers and their preparation parameters on the gas-sensitive properties of the sensors have been studied. It was found that the Ti-overlayer is very effective for enhancing the sensitivity and selectivity to NH3 gas. The sensitivity of the sensor is strongly influenced by the process parameters and the thickness of the sputtered Ti-overlayers. The sensor, using a Ti-overlayer thickness of 50 nm, features the highest gas sensitivity towards NH3, while its cross-sensitivity to other gas such as H2, SO2 and CO is comparatively small. The operating temperature of the sensor is 200°C.
AB - Thin films of modified MoO3 using Ti-overlayers have been deposited by magnetron sputtering. The gas-sensing characteristics of the sensor element, the influence of the Ti-overlayers and their preparation parameters on the gas-sensitive properties of the sensors have been studied. It was found that the Ti-overlayer is very effective for enhancing the sensitivity and selectivity to NH3 gas. The sensitivity of the sensor is strongly influenced by the process parameters and the thickness of the sputtered Ti-overlayers. The sensor, using a Ti-overlayer thickness of 50 nm, features the highest gas sensitivity towards NH3, while its cross-sensitivity to other gas such as H2, SO2 and CO is comparatively small. The operating temperature of the sensor is 200°C.
KW - Metal oxides
UR - http://www.scopus.com/inward/record.url?scp=0000715248&partnerID=8YFLogxK
U2 - 10.1016/S0925-4005(99)00506-7
DO - 10.1016/S0925-4005(99)00506-7
M3 - Conference article
AN - SCOPUS:0000715248
SN - 0925-4005
VL - 64
SP - 193
EP - 197
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1-3
T2 - Transducers '99 - 10th International Conference on Solid-State Sensors and Actuators
Y2 - 7 June 1999 through 10 June 1999
ER -