Fabrication parameters and NO2 sensitivity of reactively RF-sputtered In2O3 thin films

H. Steffes, C. Imawan, F. Solzbacher, E. Obermeier

Research output: Contribution to journalConference articlepeer-review

60 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication parameters and NO2 sensitivity of reactively RF-sputtered In2O3 thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds