Fabrication of TiO2nanotube arrays by anodization method in fluoride-H2O2-containing electrolyte for CO gas

Harry Budiman, Rahmat Wibowo, Oman Zuas, Jarnuzi Gunlazuardi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Highly ordered TiO2 nanotube arrays (HOTNAs) were prepared from Ti foil by anodization using the ethylene glycol electrolyte containing 0.3% of ammonium fluoride with different concentrations of H2O2 at 30 V for 90 minutes. The structure, crystal phase, elements composition, and morphology of HOTNAs characterized by X-ray diffraction (XRD), energy dispersive X-Ray (EDX), ultraviolet-visible diffuse reflectance spectroscopy (UV/Vis-DRS), and field emission scanning electron microscope (FE-SEM) resemble the unique properties of TiO2 nanotube arrays in the anatase form with the individual tube diameter of 38-47 nm. The nanotube arrays have been applied for the CO gas sensor. The results show that both HOTNAs sensors synthesized using electrolyte with 0.3% H2O2/0.7% H2O and 1.8% H2O2/4.2% H2O were able to detect CO gas at the concentration range of 3000-20000 ppm. However, it is observed that the sensor prepared by 0.3% H2O2/0.7% H2O-HOTNAs was more sensitive than 1.8% H2O2/4.2% H2O-HOTNAs. The different sensing behavior between 0.3% H2O2/0.7% H2O-HOTNAs and 1.8% H2O2/4.2% H2O-HOTNAs might be attributed to the difference in the morphologies of those HOTNAs nanotubes such as diameter, thickness, and length of the tube.

Original languageEnglish
Title of host publicationEngineering Physics International Conference 2021, EPIC 2021
EditorsAyodya Pradhipta Tenggara, Nur Abdillah Siddiq, Sita Gandes Pinasti, Rizki Insyani, Jundika Candra Kurnia, Geetali Saha, Rasool Moradi-Dastjerdi
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735444843
Publication statusPublished - 22 May 2023
Event3rd Engineering Physics International Conference, EPIC 2021 - Yogyakarta, Virtual, Indonesia
Duration: 24 Aug 202125 Aug 2021

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Conference3rd Engineering Physics International Conference, EPIC 2021
CityYogyakarta, Virtual


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