Fabrication of passive glass micromixer with third-dimensional feature by employing SU8 mask on micro-abrasive jet machining

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12 Citations (Scopus)

Abstract

Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design.

Original languageEnglish
Pages (from-to)474-481
Number of pages8
JournalInternational Journal of Advanced Manufacturing Technology
Volume42
Issue number5-6
DOIs
Publication statusPublished - May 2009

Keywords

  • Abrasive jet machining
  • Passive micromixer
  • SU8 mask
  • Third-dimension micro-feature

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