TY - JOUR
T1 - Fabrication of passive glass micromixer with third-dimensional feature by employing SU8 mask on micro-abrasive jet machining
AU - Saragih, Agung Shamsuddin
AU - Ko, Tae J.
PY - 2009/5
Y1 - 2009/5
N2 - Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design.
AB - Micro-abrasive jet machining (μ-AJM) is a fast and flexible technique for micro-patterning of brittle materials and can be combined with patterned mask made from a material with excellent photolithographic properties. Here, we demonstrate a fabrication method for the realization of a passive micromixer with third-dimensional feature by using a μ-AJM process with employing photopolymer as a mask on a glass slide target. We fabricated the mask using SU8, a photosensitive polymer, applied as a micro-pattern for μ-AJM process. The design and fabrication of the proposed micromixer is the first reported for such a device. Three glass layers were successfully bonded in a single step using a direct bonding method. These three bonded glass layers with micro-patterns etched on them were the realization of third-dimension feature on the micromixer design.
KW - Abrasive jet machining
KW - Passive micromixer
KW - SU8 mask
KW - Third-dimension micro-feature
UR - http://www.scopus.com/inward/record.url?scp=67349241948&partnerID=8YFLogxK
U2 - 10.1007/s00170-008-1619-x
DO - 10.1007/s00170-008-1619-x
M3 - Article
AN - SCOPUS:67349241948
SN - 0268-3768
VL - 42
SP - 474
EP - 481
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
IS - 5-6
ER -