Capacitive sensor works based on capacitive methods and serves to detect changes in the composition of dielectric materials by determining the capacitance value and dielectric constant. This type of sensor has advantages in convenient manufacturing process, a simple working mechanism, as well as extensive applications in various fields. In this study, capacitive sensors were used to characterize the electrical properties of materials that have several structures. The dielectric material samples used are bulk ZnO, ZnO synthesized by chemical bath deposition method (CBD), and synthetic ZnO results from French process. The sensors were made by a parallel plate method using two copper plates as capacitors. The sensors were designed in 2x4 cm size, with the distance between the electrodes being 1 and 2 mm. The results showed that capacitive sensors proved to be able to distinguish capacitance values and electrical permittivity of ZnO samples. From the experiment, it was known that ZnO with a rod structure synthesized through the CBD method gave the highest capacitance and electrical permittivity values compared to other ZnO samples.