Electrochemical characteristics of ZnO patterned column/SnO2 films for anodic electrodes of lithium ion batteries

Ji Hun Park, Chairul Hudaya, A. Young Kim, Joong Kee Lee

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Micro-patterned ZnO columnar structures on the surface of SnO2 film are prepared by combined photolithography and chemical vapor deposition processes. The ZnO patterned column/SnO2 film was employed as an anode of lithium ion batteries. The film deposition process is carried out by using the electron cyclotron resonance-metal organic chemical vapor deposition system. In order to investigate the relationship between the micro pattern and its electrochemical characteristics, X-ray diffraction, field emission-scanning electron microscopy and X-ray photoelectron spectroscopy are used. Field emission-scanning electron microscopy images revealed that the diameter of columnar ZnO ranges from 3 to 5 μm. The highest reversible capacity of the micro-patterned anode exhibited 1725 mAhg-1 at a current density of 200 mAg-1. Based on our experimental results, ZnO micro-patterning at the interface of the electrode plays an important role in mitigating capacity fading during repetitive cycling.

Original languageEnglish
Pages (from-to)404-409
Number of pages6
JournalThin Solid Films
Publication statusPublished - 1 Nov 2013


  • Anode materials
  • Interface control film
  • Micro-lithium ion batteries
  • Photolithography

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