Electrical, optical and structural properties of FTO thin films fabricated by spray ultrasonic nebulizer technique from SnCl4 precursor

Latifa Hanum Lalasari, Tri Arini, Lia Andriyah, F. Firdiyono, Akhmad Herman Yuwono

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

Thin films of fluorine-doped tin oxide on glass were prepared by spray ultrasonic nebulizer technique from an economic anhydrous tin (IV) chloride (SnCl4) precursor. The effect of deposition time on the structural, electrical and optical properties of tin oxide thin films was investigated. This research a purpose to find an optimum deposition time during spray pyrolysis technique in order to produce FTO with the desired characteristics. For this purpose, soda lime glasses are heated at 350°C on deposition time of 10, 15, 20 and 25 minutes. NH4F was doped at a ratio of 2 wt% in the SnCl4 precursor and methanol solvent. The results revealed that longer deposition times created decreased the electrical resistivity and optical transmittance of FTO layers. The highest optical transmittance was 84.808% and the lowest resistivity was 4.01×10-5 Ω.cm, obtained from FTO glass subjected to a 15-minute deposition time at deposition temperature of 350°C. This is accordance to the TCO conductive glass requirements for the minimum resistivity value on scale 10-4 Ω.cm and optical transmittance value of 80-85%.

Original languageEnglish
Title of host publicationProceedings of the International Seminar on Metallurgy and Materials, ISMM 2017
Subtitle of host publicationMetallurgy and Advanced Material Technology for Sustainable Development
EditorsM. Yunan Hasbi, Daniel Panghihutan Malau, Dhyah Annur, M. Ikhlasul Amal, Satrio Herbirowo, Yulinda Lestari
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735416697
DOIs
Publication statusPublished - 15 May 2018
Event1st International Seminar on Metallurgy and Materials: Metallurgy and Advanced Material Technology for Sustainable Development, ISMM 2017 - Jakarta, Indonesia
Duration: 24 Oct 201725 Oct 2017

Publication series

NameAIP Conference Proceedings
Volume1964
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference1st International Seminar on Metallurgy and Materials: Metallurgy and Advanced Material Technology for Sustainable Development, ISMM 2017
CountryIndonesia
CityJakarta
Period24/10/1725/10/17

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