TY - GEN
T1 - Electrical, optical and structural properties of FTO thin films fabricated by spray ultrasonic nebulizer technique from SnCl4 precursor
AU - Lalasari, Latifa Hanum
AU - Arini, Tri
AU - Andriyah, Lia
AU - Firdiyono, F.
AU - Yuwono, Akhmad Herman
PY - 2018/5/15
Y1 - 2018/5/15
N2 - Thin films of fluorine-doped tin oxide on glass were prepared by spray ultrasonic nebulizer technique from an economic anhydrous tin (IV) chloride (SnCl4) precursor. The effect of deposition time on the structural, electrical and optical properties of tin oxide thin films was investigated. This research a purpose to find an optimum deposition time during spray pyrolysis technique in order to produce FTO with the desired characteristics. For this purpose, soda lime glasses are heated at 350°C on deposition time of 10, 15, 20 and 25 minutes. NH4F was doped at a ratio of 2 wt% in the SnCl4 precursor and methanol solvent. The results revealed that longer deposition times created decreased the electrical resistivity and optical transmittance of FTO layers. The highest optical transmittance was 84.808% and the lowest resistivity was 4.01×10-5 Ω.cm, obtained from FTO glass subjected to a 15-minute deposition time at deposition temperature of 350°C. This is accordance to the TCO conductive glass requirements for the minimum resistivity value on scale 10-4 Ω.cm and optical transmittance value of 80-85%.
AB - Thin films of fluorine-doped tin oxide on glass were prepared by spray ultrasonic nebulizer technique from an economic anhydrous tin (IV) chloride (SnCl4) precursor. The effect of deposition time on the structural, electrical and optical properties of tin oxide thin films was investigated. This research a purpose to find an optimum deposition time during spray pyrolysis technique in order to produce FTO with the desired characteristics. For this purpose, soda lime glasses are heated at 350°C on deposition time of 10, 15, 20 and 25 minutes. NH4F was doped at a ratio of 2 wt% in the SnCl4 precursor and methanol solvent. The results revealed that longer deposition times created decreased the electrical resistivity and optical transmittance of FTO layers. The highest optical transmittance was 84.808% and the lowest resistivity was 4.01×10-5 Ω.cm, obtained from FTO glass subjected to a 15-minute deposition time at deposition temperature of 350°C. This is accordance to the TCO conductive glass requirements for the minimum resistivity value on scale 10-4 Ω.cm and optical transmittance value of 80-85%.
UR - http://www.scopus.com/inward/record.url?scp=85047816311&partnerID=8YFLogxK
U2 - 10.1063/1.5038283
DO - 10.1063/1.5038283
M3 - Conference contribution
AN - SCOPUS:85047816311
T3 - AIP Conference Proceedings
BT - Proceedings of the International Seminar on Metallurgy and Materials, ISMM 2017
A2 - Hasbi, M. Yunan
A2 - Malau, Daniel Panghihutan
A2 - Annur, Dhyah
A2 - Amal, M. Ikhlasul
A2 - Herbirowo, Satrio
A2 - Lestari, Yulinda
PB - American Institute of Physics Inc.
T2 - 1st International Seminar on Metallurgy and Materials: Metallurgy and Advanced Material Technology for Sustainable Development, ISMM 2017
Y2 - 24 October 2017 through 25 October 2017
ER -