@inproceedings{6ec2b190766640c18ba77726c287912a,
title = "Effects of growth temperature on crystal structure, electrical, and photoluminescence of ZnO thin films",
abstract = "ZnO thin films have been deposited on Si (111) substrate by ultrasonic spray pyrolisis (USP) with various growth temperatures. The polycrystalline of ZnO thin films have preferred plane (002) and relatively low donor concentrations comparing with GaN. Optically, photoluminescence (PL) spectra show the UV emission increased with increasing growth temperature. Nevertheless, green emission does not increase monotonically with increasing temperature. We believed that the ZnO thin films quality improved by increasing growth temperature.",
keywords = "Growth temperature, Hall measurement, PL, XRD, ZnO thin films",
author = "Iwan Sugihartono and Bambang Soegijono and M. Hikam and E. Handoko and Fan, {H. M.} and Tan, {S. T.} and Sun, {X. W.}",
year = "2013",
doi = "10.1109/QiR.2013.6632570",
language = "English",
isbn = "9781467357852",
series = "2013 International Conference on Quality in Research, QiR 2013 - In Conjunction with ICCS 2013: The 2nd International Conference on Civic Space",
pages = "232--234",
booktitle = "2013 International Conference on Quality in Research, QiR 2013 - In Conjunction with ICCS 2013",
note = "2013 13th International Conference on Quality in Research, QiR 2013 - In Conjunction with the 2nd International Conference on Civic Space, ICCS 2013 ; Conference date: 25-06-2013 Through 28-06-2013",
}