TY - JOUR
T1 - Digital maskless lithography capabilities for surface texturing with biomachining
AU - Imran, Muhammad
AU - Saragih, Agung Shamsuddin
AU - Sahar, Muhammad Sana Ullah
AU - Ko, Tae Jo
N1 - Publisher Copyright:
© 2016, Springer-Verlag London.
PY - 2017/4/1
Y1 - 2017/4/1
N2 - This paper presents the development of a digital maskless lithography process and its capabilities for micro-feature fabrication using biomachining as a metal removal process. The maskless lithography system was developed using a DLP projector and is used to fabricate arrays of micro-sized geometric features. Square shapes were produced in dimple and pillar modes, and the smallest widths were 60 and 50 μm, respectively. For line features, the smallest width of 35 μm was produced with a maximum gap of 60 μm. Micro-features with a high density of 140 dimples per square millimeter were also produced. Geometric dimple shapes were biomachined on iron, and tribology analysis was performed. The coefficients of friction were compared for workpieces with and without surface textures and for different dimple shapes.
AB - This paper presents the development of a digital maskless lithography process and its capabilities for micro-feature fabrication using biomachining as a metal removal process. The maskless lithography system was developed using a DLP projector and is used to fabricate arrays of micro-sized geometric features. Square shapes were produced in dimple and pillar modes, and the smallest widths were 60 and 50 μm, respectively. For line features, the smallest width of 35 μm was produced with a maximum gap of 60 μm. Micro-features with a high density of 140 dimples per square millimeter were also produced. Geometric dimple shapes were biomachined on iron, and tribology analysis was performed. The coefficients of friction were compared for workpieces with and without surface textures and for different dimple shapes.
KW - Biomachining
KW - Coefficient of friction
KW - Digital maskless photolithography
KW - Microfabrication
KW - Surface texturing
UR - http://www.scopus.com/inward/record.url?scp=84983436166&partnerID=8YFLogxK
U2 - 10.1007/s00170-016-9317-6
DO - 10.1007/s00170-016-9317-6
M3 - Article
AN - SCOPUS:84983436166
SN - 0268-3768
VL - 89
SP - 3709
EP - 3719
JO - International Journal of Advanced Manufacturing Technology
JF - International Journal of Advanced Manufacturing Technology
IS - 9-12
ER -