Digital lithography masking method on fabrication of precise uniform micro-feature array with 16 μm resolution

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	335-338
Number of pages	4
Publication status	Published - 2012
Event	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States Duration: 21 Oct 2012 → 26 Oct 2012

Conference	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
Country/Territory	United States
City	San Diego, CA
Period	21/10/12 → 26/10/12

Keywords

@conference{ba54bf73a1e94516b48c79517938d581,

title = "Digital lithography masking method on fabrication of precise uniform micro-feature array with 16 μm resolution",

keywords = "Digital lithography, Precise micro array, Uniform micro feature",

author = "Saragih, {Agung Shamsuddin} and Ko, {Tae Jo}",

year = "2012",

language = "English",

pages = "335--338",

note = "27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 ; Conference date: 21-10-2012 Through 26-10-2012",

}

TY - CONF

T1 - Digital lithography masking method on fabrication of precise uniform micro-feature array with 16 μm resolution

AU - Saragih, Agung Shamsuddin

AU - Ko, Tae Jo

PY - 2012

Y1 - 2012

KW - Digital lithography

KW - Precise micro array

KW - Uniform micro feature

UR - http://www.scopus.com/inward/record.url?scp=84884199113&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84884199113

SP - 335

EP - 338

T2 - 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012

Y2 - 21 October 2012 through 26 October 2012

ER -