Digital lithography masking method on fabrication of precise uniform micro-feature array with 16 μm resolution

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Pages335-338
Number of pages4
Publication statusPublished - 2012
Event27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States
Duration: 21 Oct 201226 Oct 2012

Conference

Conference27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
Country/TerritoryUnited States
CitySan Diego, CA
Period21/10/1226/10/12

Keywords

  • Digital lithography
  • Precise micro array
  • Uniform micro feature

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