Original language | English |
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Pages | 335-338 |
Number of pages | 4 |
Publication status | Published - 2012 |
Event | 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States Duration: 21 Oct 2012 → 26 Oct 2012 |
Conference
Conference | 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 |
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Country/Territory | United States |
City | San Diego, CA |
Period | 21/10/12 → 26/10/12 |
Keywords
- Digital lithography
- Precise micro array
- Uniform micro feature