Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zilong Zhang; Yuanzhao Wu; Liwen Sang; Haihua Wu; Jian Huang; Linjun Wang; Yukiko Takahashi; Runwei Li; Satoshi Koizumi; Masaya Toda; Indianto Mohammad Akita; Yasuo Koide; Meiyong Liao

doi:10.1080/21663831.2020.1734680

Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao

Interdisciplinary Engineering Education and Research Unit

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.

Original language	English
Pages (from-to)	180-186
Number of pages	7
Journal	Materials Research Letters
Volume	8
Issue number	5
DOIs	https://doi.org/10.1080/21663831.2020.1734680
Publication status	Published - 3 May 2020

Keywords

galfenol (FeGa)
magnetostrictive effect
MEMS
Single-crystal diamond

Access to Document

10.1080/21663831.2020.1734680

Cite this

Zhang, Z., Wu, Y., Sang, L., Wu, H., Huang, J., Wang, L., Takahashi, Y., Li, R., Koizumi, S., Toda, M., Akita, I. M., Koide, Y., & Liao, M. (2020). Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures. Materials Research Letters, 8(5), 180-186. https://doi.org/10.1080/21663831.2020.1734680

@article{adfdc08e8bca4ff3a462e0b24e8462bd,

title = "Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures",

abstract = "Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.",

keywords = "galfenol (FeGa), magnetostrictive effect, MEMS, Single-crystal diamond",

author = "Zilong Zhang and Yuanzhao Wu and Liwen Sang and Haihua Wu and Jian Huang and Linjun Wang and Yukiko Takahashi and Runwei Li and Satoshi Koizumi and Masaya Toda and Akita, {Indianto Mohammad} and Yasuo Koide and Meiyong Liao",

note = "Funding Information: This work was supported by JSPS KAKENHI [grant number 15H03999, 15H03980]; Tsukuba Global Innovation Promotion Agency, MEXT of Japan, CICP (2016YFE0126700) and China Scholarship Council. Publisher Copyright: {\textcopyright} 2020, {\textcopyright} 2020 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.",

year = "2020",

month = may,

day = "3",

doi = "10.1080/21663831.2020.1734680",

language = "English",

volume = "8",

pages = "180--186",

journal = "Materials Research Letters",

issn = "2166-3831",

publisher = "Taylor and Francis Ltd.",

number = "5",

}

Zhang, Z, Wu, Y, Sang, L, Wu, H, Huang, J, Wang, L, Takahashi, Y, Li, R, Koizumi, S, Toda, M, Akita, IM, Koide, Y & Liao, M 2020, 'Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures', Materials Research Letters, vol. 8, no. 5, pp. 180-186. https://doi.org/10.1080/21663831.2020.1734680

TY - JOUR

T1 - Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

AU - Zhang, Zilong

AU - Wu, Yuanzhao

AU - Sang, Liwen

AU - Wu, Haihua

AU - Huang, Jian

AU - Wang, Linjun

AU - Takahashi, Yukiko

AU - Li, Runwei

AU - Koizumi, Satoshi

AU - Toda, Masaya

AU - Akita, Indianto Mohammad

AU - Koide, Yasuo

AU - Liao, Meiyong

N1 - Funding Information: This work was supported by JSPS KAKENHI [grant number 15H03999, 15H03980]; Tsukuba Global Innovation Promotion Agency, MEXT of Japan, CICP (2016YFE0126700) and China Scholarship Council. Publisher Copyright: © 2020, © 2020 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.

PY - 2020/5/3

Y1 - 2020/5/3

N2 - Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.

AB - Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.

KW - galfenol (FeGa)

KW - magnetostrictive effect

KW - MEMS

KW - Single-crystal diamond

UR - http://www.scopus.com/inward/record.url?scp=85081576327&partnerID=8YFLogxK

U2 - 10.1080/21663831.2020.1734680

DO - 10.1080/21663831.2020.1734680

M3 - Article

AN - SCOPUS:85081576327

SN - 2166-3831

VL - 8

SP - 180

EP - 186

JO - Materials Research Letters

JF - Materials Research Letters

IS - 5

ER -

Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this