TY - GEN
T1 - Characterization of homemade UV-LED photolithography to realize high aspect ratio channels
AU - Rizqika, Rayzi
AU - Whulanza, Yudan
AU - Charmet, Jerome
AU - Kiswanto, Gandjar
AU - Soemard, Tresna P.
N1 - Funding Information:
This research was supported by the Universitas Indonesia Grant PIT9 in 2019 with Contract Number: NKB-0084/UN2.R3.1/HKP.05.00/2019. We would like to acknowledge funding from the Global Partnership Fund from the University of Warwick.
Publisher Copyright:
© 2020 Author(s).
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/5/6
Y1 - 2020/5/6
N2 - The ultraviolet light-emitting diode (UV-LED) photolithography has been developed since the last decade. This technology has been massively used to a microfluidic device. Generally, a complex instrument needs to be installed to fabricate such desired microfluidic devices. However, it would be an intensive investment to do so. Therefore, a low-cost photolithography is preferably compared to that conventional system that expensive and requires additional infrastructures. Here, we reported the result of our homemade UV-LED photolithography in realizing microfeature as we desired. However, a series of experiments are needed to find the optimum process parameter to have the best result. Moreover, our system achieves a 3D feature with 40-240 um thick, 40-140 um channel width, and aspect ratio until 3.5. These findings shall meet the requirement of various microfluidic applications.
AB - The ultraviolet light-emitting diode (UV-LED) photolithography has been developed since the last decade. This technology has been massively used to a microfluidic device. Generally, a complex instrument needs to be installed to fabricate such desired microfluidic devices. However, it would be an intensive investment to do so. Therefore, a low-cost photolithography is preferably compared to that conventional system that expensive and requires additional infrastructures. Here, we reported the result of our homemade UV-LED photolithography in realizing microfeature as we desired. However, a series of experiments are needed to find the optimum process parameter to have the best result. Moreover, our system achieves a 3D feature with 40-240 um thick, 40-140 um channel width, and aspect ratio until 3.5. These findings shall meet the requirement of various microfluidic applications.
UR - http://www.scopus.com/inward/record.url?scp=85096371226&partnerID=8YFLogxK
U2 - 10.1063/5.0000873
DO - 10.1063/5.0000873
M3 - Conference contribution
AN - SCOPUS:85096371226
T3 - AIP Conference Proceedings
BT - Recent Progress on
A2 - Nahry, null
A2 - Marthanty, Dwinanti Rika
PB - American Institute of Physics Inc.
T2 - 16th International Conference on Quality in Research, QiR 2019 - 2019 International Symposium on Advances in Mechanical Engineering, ISAME 2019
Y2 - 22 July 2019 through 24 July 2019
ER -