Characterization of homemade UV-LED photolithography to realize high aspect ratio channels

Rayzi Rizqika, Yudan Whulanza, Jerome Charmet, Gandjar Kiswanto, Tresna P. Soemard

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The ultraviolet light-emitting diode (UV-LED) photolithography has been developed since the last decade. This technology has been massively used to a microfluidic device. Generally, a complex instrument needs to be installed to fabricate such desired microfluidic devices. However, it would be an intensive investment to do so. Therefore, a low-cost photolithography is preferably compared to that conventional system that expensive and requires additional infrastructures. Here, we reported the result of our homemade UV-LED photolithography in realizing microfeature as we desired. However, a series of experiments are needed to find the optimum process parameter to have the best result. Moreover, our system achieves a 3D feature with 40-240 um thick, 40-140 um channel width, and aspect ratio until 3.5. These findings shall meet the requirement of various microfluidic applications.

Original languageEnglish
Title of host publicationRecent Progress on
Subtitle of host publicationMechanical, Infrastructure and Industrial Engineering - Proceedings of the International Symposium on Advances in Mechanical Engineering, ISAME 2019: Quality in Research 2019
Editors Nahry, Dwinanti Rika Marthanty
PublisherAmerican Institute of Physics Inc.
ISBN (Electronic)9780735419865
DOIs
Publication statusPublished - 6 May 2020
Event16th International Conference on Quality in Research, QiR 2019 - 2019 International Symposium on Advances in Mechanical Engineering, ISAME 2019 - Padang, Indonesia
Duration: 22 Jul 201924 Jul 2019

Publication series

NameAIP Conference Proceedings
Volume2227
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference16th International Conference on Quality in Research, QiR 2019 - 2019 International Symposium on Advances in Mechanical Engineering, ISAME 2019
Country/TerritoryIndonesia
CityPadang
Period22/07/1924/07/19

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