Characteristics of Fluorine-Doped Tin Oxide as a Transparent Heater on PET Prepared by ECR-MOCVD

Chairul Hudaya, J. H. Park, W. C. Choi, J. K. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Citations (Scopus)

Abstract

Fluorine-doped tin oxide (FTO) thin films on a polyethylene terephthalate (PET) as a flexible transparent heater was prepared by electron cyclotron resonance - metal organic chemical vapor deposition (ECR-MOCVD). Under plasma environment, the films were fabricated by supplying tetra-methyl tin (TMT) as precursors for tin, sulfur-hexafluoride (SF6) as precursor for fluorine atoms, oxygen and hydrogen for about 15 min deposition. The result shows that the FTO films have nanocrystalline structure with a grain size of 30-60 nm, a thickness of 300 nm and transmittance over 85 %. The observed lowest sheet resistance of 253 Ω was found in our experimental range. We conclude that the optimum content of fluorine doping plays an important role to affect the structural, electrical, optical and thermal properties of the FTO thin films as transparent materials.

Original languageEnglish
Title of host publicationNanocrystal Embedded Dielectrics for Electronic and Photonic Devices
Pages161-166
Number of pages6
Edition4
DOIs
Publication statusPublished - 21 Oct 2013
EventNanocrystal Embedded Dielectrics for Electronic and Photonic Devices - 223rd ECS Meeting - Toronto, ON, Canada
Duration: 12 May 201316 May 2013

Publication series

NameECS Transactions
Number4
Volume53
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceNanocrystal Embedded Dielectrics for Electronic and Photonic Devices - 223rd ECS Meeting
CountryCanada
CityToronto, ON
Period12/05/1316/05/13

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