Boron doped polycrystalline silicon produced by step-by-step XeCl excimer laser crystallization

Rosari Saleh, Norbert H. Nickel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint Dive into the research topics of 'Boron doped polycrystalline silicon produced by step-by-step XeCl excimer laser crystallization'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy