Atmospheric pressure plasma functionalization of carbon nanotube dot-array with two-stage plasma treatments for the development of bio-chip sensors

Tomy Abuzairi, Masaaki Nagatsu, Nji Raden Poespawati, Retno Wigajatri Purnamaningsih, Mitsuru Okada, Yohei Mochizuki

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An atmospheric pressure plasma jet (APPJ) technique was developed to functionalize amino groups to obtain plasma-functionalized carbon nanotube (CNT) dot-array as a precursor of biomolecules of the bio-chip sensor. To realize bio-chip sensors based on CNT, it is needed the proper control of their surface functionalization. An APPJ technique for CNT functionalization was implemented in the two-stages: (1) pre-treatment with by Ar gas -500 V dc bias and (2) post-treatment by Ar and NH3 gas mixture without substrate bias. Two-stages plasma treatment are important factors for performing surface functionalization in the APPJ, without any pre-treatment or when we only applying the post-treatment, no functionalization occur in the CNT dot-array.

Original languageEnglish
Title of host publication14th International Conference on QiR (Quality in Research), QiR 2015 - In conjunction with 4th Asian Symposium on Material Processing, ASMP 2015 and International Conference in Saving Energy in Refrigeration and Air Conditioning, ICSERA 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages16-18
Number of pages3
ISBN (Electronic)9781479965519
DOIs
Publication statusPublished - 7 Jan 2016
Event14th International Conference on QiR (Quality in Research), QiR 2015 - Lombok, Indonesia
Duration: 10 Aug 201513 Aug 2015

Publication series

Name14th International Conference on QiR (Quality in Research), QiR 2015 - In conjunction with 4th Asian Symposium on Material Processing, ASMP 2015 and International Conference in Saving Energy in Refrigeration and Air Conditioning, ICSERA 2015

Conference

Conference14th International Conference on QiR (Quality in Research), QiR 2015
Country/TerritoryIndonesia
CityLombok
Period10/08/1513/08/15

Keywords

  • atmospheric pressure plasma
  • bio-chip sensors
  • carbon nanotube
  • functionalization
  • two-stage plasma treatment

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