Antiglare and antireflective coating of layer-by-layer SiO2 and TiZrO2 on surface-modified glass

Chairul Hudaya, Bup Ju Jeon, Ariono Verdianto, Joong Kee Lee, Yung Eun Sung

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Antiglare and antireflection materials take considerable research attention due to its important role in transparent optical materials for various purposes. In this study, we employed layer-by-layer coating materials consist of SiO2 and TiZrO2 deposited on etched-surface glass substrate using dual electron beam evaporator system. The surface morphology investigated by using scanning electron microscopy (SEM) exhibited the microstructure patterns of glass surface. The cross-sectional image of transmission electron microscopy (TEM) showed uniformly layer-by-layer coating materials with the thickness of ~20–80 nm. The Auger electron spectroscopy (AES) revealed the depth profiles of elemental composition of surface layer-by-layer coating, confirming the presence of elements of SiO2 and TiZrO2 layers. In addition, the layer-by-layer coated glass surface performed the hydrophobic properties with contact angle of 69°. The microstructure surface treatment and layer-by-layer coating have successfully decreased the reflectance (~3%) and increased the transmittance of the treated glass (~91%), opening the possibility for the applications of any optical devices.

Original languageEnglish
Pages (from-to)278-282
Number of pages5
JournalApplied Surface Science
Publication statusPublished - 1 Oct 2019


  • Antiglare
  • Antireflection
  • Layer-by-layer coating
  • SiO
  • TiZrO
  • Transparent optical materials


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