Antenna-Coupled Terahertz Microbolometers with Meander Structures: The Comparison of Titanium and Platinum Thermistors

N. Hiromoto, E. Durgadevi, A. Baneriee, H. Satoh, H. Inokawa, Catur Apriono, Eko Tjipto Rahardjo, D. Itoh, E. Bruendermann

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

Uncooled terahertz (THz) detectors with low noise-equivalent power (NEP) are especially important for the application of non-destructive sensing in many fields. Antenna-coupled THz microbolometers with meander thermistors of titanium (Ti) and Platinum (Pt) are studied to develop room-temperature THz detectors. The responsivity and NEP of the microbolometer with a meander Ti thermistor are much improved for 1 THz irradiation in comparison with those of the previous one with a straight Ti thermistor. The THz performance of the meander Ti bolometer is much better than the one with a meander Pt thermistor. Those results can be explained by the increase of the thermistor resistance and temperature coefficient of resistance (TCR) through innovating the meander line and also improving the fabrication process based on the electron beam (EB) lithography.

Original languageEnglish
Title of host publication2018 43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538638095
DOIs
Publication statusPublished - 25 Oct 2018
Event43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018 - Nagoya, Japan
Duration: 9 Sep 201814 Sep 2018

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume2018-September
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Conference

Conference43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018
CountryJapan
CityNagoya
Period9/09/1814/09/18

Fingerprint Dive into the research topics of 'Antenna-Coupled Terahertz Microbolometers with Meander Structures: The Comparison of Titanium and Platinum Thermistors'. Together they form a unique fingerprint.

Cite this