@inproceedings{add43ba1d0d64b52baa2c989b6ff6fde,
title = "Antenna-Coupled Terahertz Microbolometers with Meander Structures: The Comparison of Titanium and Platinum Thermistors",
abstract = "Uncooled terahertz (THz) detectors with low noise-equivalent power (NEP) are especially important for the application of non-destructive sensing in many fields. Antenna-coupled THz microbolometers with meander thermistors of titanium (Ti) and Platinum (Pt) are studied to develop room-temperature THz detectors. The responsivity and NEP of the microbolometer with a meander Ti thermistor are much improved for 1 THz irradiation in comparison with those of the previous one with a straight Ti thermistor. The THz performance of the meander Ti bolometer is much better than the one with a meander Pt thermistor. Those results can be explained by the increase of the thermistor resistance and temperature coefficient of resistance (TCR) through innovating the meander line and also improving the fabrication process based on the electron beam (EB) lithography.",
author = "N. Hiromoto and E. Durgadevi and A. Baneriee and H. Satoh and H. Inokawa and C. Apriono and Rahardjo, {E. T.} and D. Itoh and E. Bruendermann",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018 ; Conference date: 09-09-2018 Through 14-09-2018",
year = "2018",
month = oct,
day = "25",
doi = "10.1109/IRMMW-THz.2018.8509929",
language = "English",
series = "International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz",
publisher = "IEEE Computer Society",
booktitle = "2018 43rd International Conference on Infrared Millimeter and Terahertz Waves, IRMMW-THz 2018",
address = "United States",
}