Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

Kyu J. Lee, Purnomo Sidi Priambodo, Robert Magnusson

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH.

Original languageEnglish
Pages (from-to)409-414
Number of pages6
JournalIEEE Sensors Journal
Volume7
Issue number3
DOIs
Publication statusPublished - 7 Mar 2007

Keywords

  • Agarose gels
  • diffractive optical elements
  • guided-mode resonance
  • humidity sensor
  • optical sensor
  • relative humidity

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