Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

Kyu J. Lee; Purnomo S. Priambodo; Robert Magnusson

doi:10.1109/JSEN.2006.890129

Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

Kyu J. Lee, Purnomo S. Priambodo, Robert Magnusson

Department of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH.

Original language	English
Pages (from-to)	409-414
Number of pages	6
Journal	IEEE Sensors Journal
Volume	7
Issue number	3
DOIs	https://doi.org/10.1109/JSEN.2006.890129
Publication status	Published - 7 Mar 2007

Keywords

Agarose gels
diffractive optical elements
guided-mode resonance
humidity sensor
optical sensor
relative humidity

Access to Document

10.1109/JSEN.2006.890129

Cite this

@article{dc008725383a4ad58d0fa9287b6b4987,

title = "Agarose-Gel Based Guided-Mode Resonance Humidity Sensor",

abstract = "A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH.",

keywords = "Agarose gels, diffractive optical elements, guided-mode resonance, humidity sensor, optical sensor, relative humidity",

author = "Lee, {Kyu J.} and Priambodo, {Purnomo S.} and Robert Magnusson",

note = "Funding Information: Manuscript received January 13, 2006; revised March 8, 2006; accepted May 11, 2006. This work was supported in part by the U.S. Army and the Connecticut Global Fuel Cell Center under contract number OT DAAB07-03-3-K415 Portable Fuel Cell Systems. The associate editor coordinating the review of this paper and approving it for publication was Dr. M. Abedin.",

year = "2007",

month = mar,

day = "7",

doi = "10.1109/JSEN.2006.890129",

language = "English",

volume = "7",

pages = "409--414",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

}

TY - JOUR

T1 - Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

AU - Lee, Kyu J.

AU - Priambodo, Purnomo S.

AU - Magnusson, Robert

N1 - Funding Information: Manuscript received January 13, 2006; revised March 8, 2006; accepted May 11, 2006. This work was supported in part by the U.S. Army and the Connecticut Global Fuel Cell Center under contract number OT DAAB07-03-3-K415 Portable Fuel Cell Systems. The associate editor coordinating the review of this paper and approving it for publication was Dr. M. Abedin.

PY - 2007/3/7

Y1 - 2007/3/7

N2 - A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH.

AB - A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH.

KW - Agarose gels

KW - diffractive optical elements

KW - guided-mode resonance

KW - humidity sensor

KW - optical sensor

KW - relative humidity

UR - http://www.scopus.com/inward/record.url?scp=85008066175&partnerID=8YFLogxK

U2 - 10.1109/JSEN.2006.890129

DO - 10.1109/JSEN.2006.890129

M3 - Article

AN - SCOPUS:85008066175

SN - 1530-437X

VL - 7

SP - 409

EP - 414

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 3

ER -

Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this