TY - JOUR
T1 - Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches
AU - Santoso Tamsir, Agus
AU - Tannu Wijaya, Sandy
AU - Yeop Majlis, Dato’ Burhanuddin
PY - 2014
Y1 - 2014
N2 - The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.
AB - The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.
UR - http://journal.ui.ac.id/technology/index.php/journal/article/view/2942
U2 - 10.7454/mst.v18i2.2942
DO - 10.7454/mst.v18i2.2942
M3 - Article
SN - 2355-2786
VL - 18
SP - 59
EP - 62
JO - Makara Journal of Technology
JF - Makara Journal of Technology
IS - 2
ER -