A thick SU-8 mask for microabrasive jet machining on glass

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14 Citations (Scopus)


This work presents the implementation of a thick SU-8 layer as a mask in the microabrasive jet machining (μ-AJM) process. A microchannel with an aspect ratio of 0.33, which was obtained in this work, had an arc-shape with a width of 190 μm and a depth of 70 μm. The process phenomena that are important for achieving a qualified microchannel for microfluidic applications are discussed. By using the repeated sequence of steps proposed in this paper, three-dimensional microchannels on a single glass slide can be fabricated.

Original languageEnglish
Pages (from-to)734-740
Number of pages7
JournalInternational Journal of Advanced Manufacturing Technology
Issue number7-8
Publication statusPublished - Apr 2009


  • Abrasive jet machining
  • Microchannel
  • SU-8 mask


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