A thick SU-8 mask for microabrasive jet machining on glass

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

This work presents the implementation of a thick SU-8 layer as a mask in the microabrasive jet machining (μ-AJM) process. A microchannel with an aspect ratio of 0.33, which was obtained in this work, had an arc-shape with a width of 190 μm and a depth of 70 μm. The process phenomena that are important for achieving a qualified microchannel for microfluidic applications are discussed. By using the repeated sequence of steps proposed in this paper, three-dimensional microchannels on a single glass slide can be fabricated.

Original languageEnglish
Pages (from-to)734-740
Number of pages7
JournalInternational Journal of Advanced Manufacturing Technology
Volume41
Issue number7-8
DOIs
Publication statusPublished - 1 Apr 2009

Keywords

  • Abrasive jet machining
  • Microchannel
  • SU-8 mask

Fingerprint Dive into the research topics of 'A thick SU-8 mask for microabrasive jet machining on glass'. Together they form a unique fingerprint.

Cite this