A modular system of SiC-based microhotplates for the application in metal oxide gas sensors

Keyphrases

• Modular System 100%
• SiC Membrane 100%
• Operating Voltage 100%
• Metal Oxide Gas Sensor 100%
• Micro-hotplate 100%
• Operating Temperature 50%
• Support Structure 50%
• N-doping 50%
• HfB2 50%
• Hot Plate 50%
• Micro-bridge 50%
• Polycrystalline 3C-SiC 50%
• Active Part 50%
• Heater 50%
• Thin-film Heaters 50%
• Basic Building Block 50%

Engineering

• Gas Sensor 100%
• Operating Voltage 100%
• Operating Temperature 50%
• Thin Films 50%
• Supporting Structure 50%
• Building Block 50%
• Polycrystalline 50%