TY - JOUR
T1 - A modular system of SiC-based microhotplates for the application in metal oxide gas sensors
AU - Solzbacher, F.
AU - Imawan, C.
AU - Steffes, H.
AU - Obermeier, E.
AU - Möller, H.
N1 - Funding Information:
The authors would like to thank Dr. Skorupa at Forschungszentrum Rossendorf for performing the high temperature ion implantations. Financial support through the German Ministry of Education, Research and Technology BMBF is gratefully acknowledged.
PY - 2000/6/10
Y1 - 2000/6/10
N2 - A modular system of SiC-based microhotplates with integrated IDC for the use in metal oxide gas sensors is presented. Basic building block of the sensors is a 1 μm thick polycrystalline 3C-SiC membrane, which acts as supporting structure. A 200 nm thick HfB2 thin film heater with a de-resistance of about 12 Ω (1-2 V operating voltage) or alternatively an N-doped area in the SiC-membrane (12 V operating voltage) is used as hotplate. The active part of the membrane is separated from the surrounding membrane by six SiC-microbridges of 150 μm length and widths of 10, 20 and 40 μm. The heater is designed for operating temperatures up to 700°C and can be operated at about 400°C with a power of 35 mW.
AB - A modular system of SiC-based microhotplates with integrated IDC for the use in metal oxide gas sensors is presented. Basic building block of the sensors is a 1 μm thick polycrystalline 3C-SiC membrane, which acts as supporting structure. A 200 nm thick HfB2 thin film heater with a de-resistance of about 12 Ω (1-2 V operating voltage) or alternatively an N-doped area in the SiC-membrane (12 V operating voltage) is used as hotplate. The active part of the membrane is separated from the surrounding membrane by six SiC-microbridges of 150 μm length and widths of 10, 20 and 40 μm. The heater is designed for operating temperatures up to 700°C and can be operated at about 400°C with a power of 35 mW.
KW - Gas sensors
KW - Metal oxides
KW - Microhotplate
KW - SiC
UR - http://www.scopus.com/inward/record.url?scp=0010992796&partnerID=8YFLogxK
U2 - 10.1016/S0925-4005(99)00490-6
DO - 10.1016/S0925-4005(99)00490-6
M3 - Conference article
AN - SCOPUS:0010992796
SN - 0925-4005
VL - 64
SP - 95
EP - 101
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1-3
T2 - Transducers '99 - 10th International Conference on Solid-State Sensors and Actuators
Y2 - 7 June 1999 through 10 June 1999
ER -