A modular system of SiC-based microhotplates for the application in metal oxide gas sensors

F. Solzbacher, Cuk Imawan, H. Steffes, E. Obermeier, H. Möller

Research output: Contribution to journalConference articlepeer-review

31 Citations (Scopus)

Abstract

A modular system of SiC-based microhotplates with integrated IDC for the use in metal oxide gas sensors is presented. Basic building block of the sensors is a 1 μm thick polycrystalline 3C-SiC membrane, which acts as supporting structure. A 200 nm thick HfB2 thin film heater with a de-resistance of about 12 Ω (1-2 V operating voltage) or alternatively an N-doped area in the SiC-membrane (12 V operating voltage) is used as hotplate. The active part of the membrane is separated from the surrounding membrane by six SiC-microbridges of 150 μm length and widths of 10, 20 and 40 μm. The heater is designed for operating temperatures up to 700°C and can be operated at about 400°C with a power of 35 mW.

Original languageEnglish
Pages (from-to)95-101
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume64
Issue number1-3
DOIs
Publication statusPublished - 10 Jun 2000
EventTransducers '99 - 10th International Conference on Solid-State Sensors and Actuators - Sendai, Japan
Duration: 7 Jun 199910 Jun 1999

Keywords

  • Gas sensors
  • Metal oxides
  • Microhotplate
  • SiC

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